Recently, the Pharos 310 electron beam exposure machine independently developed by Beijing Goldenscope Technology Co., Ltd. has officially obtained the first major technical equipment certification in Beijing, marking the product as the first domestically produced commercial EBL equipment certified by official authorities.

Pharos series Electron beam lithography machine

Electron beam lithography machine is widely used in national strategic related fields such as micro nano processing and semiconductor device preparation. Previously, China had long relied on imports in this field and was repeatedly subject to sanctions, severely restricting the development of the technology industry. The Pharos series electron beam exposure machines launched by Goldenscope Technology have broken this situation and provided key support for solving the bottleneck dilemma in this field.

Goldenscope Technology's Electron beam lithography machine achieved its first public bidding as early as August 2023, becoming the first benchmark for the domestic commercialization of this type of equipment. In the field of high-end equipment, technological maturity requires long-term verification. Pharos 310 not only passed the market inspection earlier, but also has been successfully accepted and put into use in Tianjin University, Beijing University of Technology, Taiyuan University of Technology, Chinese Academy of Sciences Suzhou Institute of Nanotechnology and Nanobionics and other universities and research institutions.

In 2024, Goldenscope Technology, as a key scientific instrument enterprise, was invited to participate in the Zhongguancun Forum and showcased its product in the "Ten Years of Collaborative Development in Beijing Tianjin Hebei" exhibition area. The Pharos 310 attracted widespread attention upon its first public appearance. In March 2025, the General Manager of the company, He Chao, announced the technological achievements of high-precision electron beam exposure machines at the "National Major Scientific Research Achievement Demonstration Application Matchmaking Conference - Quantum Technology Field" at the Zhongguancun Forum. The Pharos series electron beam exposure machines have stable commercial service capabilities through continuous technological iteration. This rapid transformation from technological breakthroughs to industrial applications is a reflection of Goldenscope Technology's innovation strength as a national level specialized, refined, and innovative "little giant" enterprise.

The first domestic EBL developed by Goldenscope Technology was reported by Beijing Television

Obtaining the first (set) certification this time is not only a high recognition of Goldenscope Technology's technological strength, but also a powerful proof of China's independent innovation ability in the field of high-end scientific instruments.

Goldenscope Technology will continue to respond to the strategic deployment of scientific and technological innovation and industrial upgrading in the national "14th Five Year Plan", strengthen cooperation with universities, research institutions, and enterprises, and accelerate the transformation and application of scientific and technological achievements. We are confident in achieving more breakthroughs in the field of high-end scientific instruments and contributing greater strength to China's technological self-reliance and self-improvement.